The effects of the simultaneous addition of diborane and ammonia on the hot-filament assisted chemical vapor deposition of diamond

摘要

The effects of the simultaneous addition of diborane and ammonia on the nucleation density andgrowth rate of diamond prepared by hot-filament assisted chemical vapor depositions were examined.The diamond nucleation density and growth rate decreased as the B/C and N/B input ratios wereincreased owing to poisoning of the diamond surface and depletion of methyl radicals. This reductionin the amount of diamond could be compensated for by increasing the substrate and filamenttemperatures, and increasing the concentration of diamond growth species. Up to a B/C inputreactant gas ratio of approximately 0.1, faceted diamond particles and an amorphous B-C-Ncontinuous film were codeposited. For B/C >0.1, only the B-C-N film was formed..