The tribological performance of BCN films under ionic liquids lubrication

摘要

Boron carbon nitride films were deposited onto silicon substrates by medium frequency magnetron sputtering from graphite and boron targets with Ar and N_2 as feedstock. The three elements of B, C and N were bonded to each other and an atomic-level hybridized B-C-N had been formed in the films. The tribological performances of the boron carbon nitride film with 1-butyl, 3-methylimidazolium tetrafluoroborate ionic liquid as lubricant and the electrochemical corrosive behaviors of the BCN film were investigated. The boron carbon nitride film demonstrated excellent tribological properties and corrosion resistance as compared with diamond like carbon film. An extensive discussion of the effect of film intrinsically structure on both lubrication and corrosion under ionic liquid condition is given. In addition, the interrelation between the tribological properties and corrosion resistance is illustrated.