MODELING ELECTROSTATIC FIELD IN MEMS DEVICES USING ARTIFICIAL SPRINGS INRAYLEIGH-RITZ METHOD

摘要

Micro Electro Mechanical Systems (MEMS) aremechanical devices having moving components of size inthe order of tens of micrometers that are integrated withelectronic circuitry in the same chip. An electrostaticallyactuated MEMS device is shown Fig. 1. This device wasmanufactured through surface micromachining process.