Crystallite size and micro- and macro-strain changes during layer exchangeupon annealing amorphous/crystalline aluminium

摘要

Crystallite size and micro- and macro-strain changes during layer exchange upon annealing amorphous silicon/crystalline aluminium (a-Si/c-AI) bilayers at 165℃ and at 250 for various times were evaluated by X-ray diffraction analysis (analysis of both dif-fraction-line shift and diffraction-line broadening). As revealed by Auger electron spectro-scopic depth profiling, c-Al→c-Si layer exchange occurs upon annealing at 250℃ (more or less completely) and at 165℃ (partially). Upon layer exchange, the Al {111} fibre texture in the bilayer becomes stronger, the Al crystallites grow in both lateral and perpendicular directions, and both the macrostress and the microstrain in the Al sublayer are released. The amorphous Si sublayer crystallizes into an aggregate of nanocrystals with {111} planes par-allel to the surface, exhibiting very large microstrains of 0.7-2.6%, depending on annealing temperature and time.