Organophosphine/phosphite stabilized disilver(i) methanedisulphonates: Synthesis, solid state structures and their potential use as MOCVD precursors

摘要

New disilver(i) methanedisulphonate complexes [CH_2(SO _3)_2Ag_2·L_n] (L = PPh _3; n = 2, 2a; n = 3, 2b; n = 4, 2c; n = 5, 2d; n = 6, 2e; L = P(OEt)_3; n = 2, 2f; n = 4, 2g; n = 6, 2h) were prepared by the reaction of [CH_2(SO_3)_2Ag_2], which could be synthesized from methanedisulphonic acid and Ag_2CO _3 in water, with triphenylphosphine or triethylphosphite in dichloromethane under a nitrogen atmosphere. The solid state structures of three complexes 2c, 2d and 2f were determined by single X-ray structure analysis. Hot-wall metal organic chemical vapor deposition (MOCVD) experiments were carried out at 395 °C, 420 °C and 450 °C using 2g as precursor for the deposition of silver films, respectively. The silver film with high purity obtained at 420 °C is dense and homogeneous, which is composed of many well isolated, granular particulates spreading all over the substrate surface.