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Effects of secondary electron emission from a floating surface on the plasma sheath

机译:等离子体鞘上漂浮表面的二次电子发射的影响

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摘要

The paper describes the region between a Maxwellian plasma source and a floating surface by a 1D-3 V fully kinetic, electrostatic particle simulation. The electric field is self-consistently computed from the Poisson equation. The secondary electron emission is modelled by considering an expression for the secondary emission coefficient dependent on the primary electron energy and surface materials and a realistic secondary electron distribution function is introduced at the collector surface. The model is able to simulate the space-charge-limited conditions as well as the positively charged wall cases. (C) 2003 Elsevier Ltd. All rights reserved. [References: 9]
机译:本文通过1D-3 V全动力学,静电粒子模拟描述了Maxwellian等离子体源和浮动表面之间的区域。电场是根据泊松方程自洽地计算的。通过考虑依赖于一次电子能量和表面材料的二次发射系数的表达式对二次电子发射进行建模,并在集电极表面引入实际的二次电子分布函数。该模型能够模拟空间电荷受限的条件以及带正电的墙盒。 (C)2003 Elsevier Ltd.保留所有权利。 [参考:9]

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