Miniaturization of mass spectrometer-based leak detection technology-technical note

摘要

Innovative pumping technology combining both, small-sized scroll- and turbomolecular pumps results in a substantial miniaturization of mass spectrometer- based leak-detector-systems, namely reduction of the outer dimensions to less than 30 x 30 x 15 cut and weight to less than 8 kg. To date this technique utilizes the Paul trap principle for leak detection with a sensitivity down to below 10(-10) mbar1s(-1). (C) 2004 Elsevier Ltd. All rights reserved. [References: 4]