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Comparison between Monte Carlo and analytical calculation of Clausing functions of cylindrical and conical tubes

机译:蒙特卡洛法与圆柱管和圆锥管子句函数解析计算的比较

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In a previous work (J. Vac. Sci. Technol. A 21 (2003) 1452), we calculated the transmission probabilities for cylindrical and conical ducts, solving numerically the Clausing integral equation and integrating the resulting Clausing function. It is also important to obtain the Clausing function itself, because it is proportional to the distribution of molecular collisions with the walls of the system, as we show in this contribution. Besides, the density profile of the gas inside the duct can be calculated using the Clausing function, as shown by Davies and Lucas (J. Phys. D: Appl. Phys. 16 (1983) 1). We have calculated the Clausing functions for different cylindrical and conical ducts using a Monte Carlo simulation method and we have compared these results to the numerical ones, finding a very good agreement, within statistical uncertainties. (C) 2004 Elsevier Ltd. All rights reserved.
机译:在以前的工作中(J. Vac。Sci。Technol。A 21(2003)1452),我们计算了圆柱和圆锥形管道的传输概率,对数值的Clausing积分方程进行了数值求解,并对得到的Clausing函数进行积分。获得子句功能本身也很重要,因为它与与系统壁的分子碰撞的分布成比例,如我们在此贡献中所示。此外,如Davies和Lucas(J.Phys.D:Appl.Phys.16(1983)1)所示,可以使用克劳斯函数来计算导管内气体的密度分布。我们使用蒙特卡洛模拟方法计算了不同圆柱和圆锥形管道的克劳斯函数,并将这些结果与数值结果进行了比较,在统计不确定性内找到了很好的一致性。 (C)2004 Elsevier Ltd.保留所有权利。

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