Structure and optical properties of (Al2O3)(x)(Tio)1-(x) thin films prepared by a sol-gel processing

摘要

(Al2O3)(x)(TiO2)(1-x) thin films obtained from sol solutions by spin coating technique have been studied. The chemical composition and stoichiometry of the films have been determined by X-ray photoelectron spectroscopy (XPS) and Rutherford backscattering spectroscopy (RBS). The peaks at 461.48 eV for Al2p and Ti2p at 74.4 eV are characteristic for the respective metal oxides and indicate the presence of Al2O3 and TiO2. The refractive index, dielectric constant and optical band gap for direct transitions have been determined for varying Al:Ti ratios in the starting solution. (C) 2004 Elsevier Ltd. All rights reserved.