Bayard-Alpert gauge with additional ion collector for pressure measurements from 10{sup}-9-10{sup}1 mbar

摘要

Commercial hot filament ionization gauges of Bayard-Alpert type can be used for the pressure measurement usually below the upper pressure limit of 10{sup}(-2) mbar. There are some special gauge types for high-pressure measurement. but the requirements for the gauge designs for high- and low-pressure measurement are contradictory. The aim of our gauge construction is to combine low and high-pressure measurement in one gauge in a very simple way without changing of electrode potentials. This was achieved by introducing a second ion collector behind the cathode of a Bayard-Alpert structure. This construction was optimized with the help of numerical calculations and tests by experimental work.