首页> 外文期刊>Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology >Letter to the editor dependence of the outgassing rate of a 'vacuum fired' 316LN stainless steel chamber on bake-out temperature
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Letter to the editor dependence of the outgassing rate of a 'vacuum fired' 316LN stainless steel chamber on bake-out temperature

机译:致编辑的信“烘烤真空” 316LN不锈钢腔室的脱气速率与烘烤温度的关系

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摘要

It was found that the outgassing rate of a vacuum fired 316 LN stainless steel chamber increased with bakeout temperature in the range of 100℃ to 180℃.
机译:结果发现,随着焙烧温度在100℃至180℃范围内,真空烧制316LN不锈钢腔室的除气率增加。

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