Examination of ion-induced Auger electron spectra of Ti, Cr and Co in a mass-selecting Focused Ion Beam with a gold-silicon liquid metal source

摘要

Ion induced Auger electron spectroscopy is a technique where Auger electrons are produced as a result of energetic ion impact. In this paper, the ion-induced electron spectra of three of the transition metals; Ti, Cr and Co by Si~(++) and Au~+ ions accelerated to 30 and 60 keV are studied. Aside from the low energy plasmon peaks, sharp M_(23)M_(45)M_(45) Auger transitions with high signal to noise ratio attributed to the metal targets and, in the samples bombarded by Si~(++) ions, L_(23)MM transition from Si incident ion are also detected. Broad tails next to the main metal Auger peaks are attributed to interatomic transitions between the incident ion and target ions.