Low-cost interferometric compensation of geometrical errors

摘要

Numerous interferometric techniques to compensate machine geometrical errors have been presented and successfully applied. However, the issue of equipment and labour costs still remains. This project aims at cutting such costs while keeping good metrology. The basic idea of the proposed technique is the interferometric measurement of independent lines: unlike laser trackers and tracers, which measure while pointing, with this technique only straight line interferometric measurements are carried out, omitting the need for high accuracy pointing and for a very isotropic target retroreflector. Thorough simulation shows that a well-designed experimental plan is key to success.