The influence of process vibrations on precision polishing metrics

摘要

This work details the impact of process vibrations on precision polishing metrics such as material removal rates and surface finish. Process vibrations were measured on two different polishers operating under 'identical' conditions (same spindle speeds, tooling, and over-arm swing rates). Differences in the vibration signatures were noted between the two machines. Fused silica samples were polished on both machines using synthetic pitch tools and the resulting material removal rates and surface finishes compared. The machine with the greater vibration content at higher frequencies (>500 Hz) produced higher material removal rates and higher low spatial frequency roughness values.