Universal high precision reference spheres for multisensor coordinate measuring machines

摘要

Reference spheres play an important role in the accuracy of multisensor coordinate measuring machine (CMM) applications. Nowadays there are a number of spheres specialized in the characteristics of different CMM probing systems. This paper presents a unique reference sphere which meets sometimes contradictory requirements of different measurement principles. With this sphere it is possible to qualify all probing systems widely used today. It is suitable for contacting and non-contacting probing systems such as vision systems, chromatic and laser probes and Computed Tomography. With this sphere, it is possible to achieve tactile probing errors of less than 1 μm.