A Spectroscopic-and-Optical Investigation of the Structure of the Electrode Region of an Electrode Microwave Discharge in Hydrogen

摘要

The structure of the electrode region of an electrode microwave discharge is subjected to the spec-troscopic-and-optical investigation in hydrogen at a pressure of 1-8 torr and incident power up to 100 W. It is shown that the electrode region has an inhomogeneous structure which, in the lower pressure range, is defined by the plasma resonance which is insignificant in the upper range of the investigated pressures.