Ability in Quantitative Current Evaluation by Magnetic Force Microscopy

摘要

Magnetic field around fine current paths has been investigated by magnetic force microscopy (MFM) for a purpose of current evaluation with high spatial resolution. To discuss quantitativeness in current evaluation of our method, the magnetic fields around artificial current networks were observed, and the results were compared with expected current values flowing through each current path. The results apparently demonstrate the ability in quantitative evaluation of current through the magnetic field observation by MFM.