Textured surface silicon solar cells with SnO{sub}2 antireflex layer

摘要

This paper presents a new method which permit to improve the performance of silicon solar cell using a low cost technology. The texturisation of the front surface using silicon micromachining technology combined with antireflex SnO{sub}2 layer permittes us to reduce frontal reflectivity and to obtain the lowest possible reflectance. Two types of antireflexion thin film coatings have been studied in order to find a compromise between reflectance and sheet resistance: a simple SnO{sub}2 layer and indium doped SnO{sub}2 one. Heterojunction SnO{sub}2:In silicon substrate ("honeycomb" textured) solar cells were manufactured by the sol gel method over textured p and n-type single CZ crystal silicon substrate wafers, with <100> orientation The obtained textured structures were studied by several methods, like: surface scanning with electron microscope (SEM), optical measurements and spectrophotometric evaluations.