INFLUENCE OF NITROGEN LASER BEAM ON THIN-FILM COATINGS

摘要

This paper presents the results of experimental and theoretical studies of the influence of a nanosecond laser beam of UV band (λ = 337 nm) with energy of up to 1 mJ on a surface of thin (0.5-5 μm) coatings (Ti, TiN, Al-Si, Al-Si-N) deposited on a glass substrate by a vacuum-arc method. Based on the data obtained, the dependences of the effect of explosive spark formation on the thickness of a coating, its properties, and the conditions of laser influence in an atmosphere of different gases are presented. The mathematical model of the processes occurring in a coating/ substrate system exposed to laser irradiation is described; the value of the thickness of a coating at which its destruction occurs with intense sparking is defined.