SYNTHESIS OF NANOSTRUCTURED NITRIDE COATINGS BY VACUUM ARC EVAPORATION OF SINTERED Ti-Al CATHODES

摘要

This paper discusses the possibility of the formation of nanostructured coatings with the use of composite powder Ti-Al system cathodes in low-pressure arc discharges. The results of investigation of sintered Ti-40 at.% Al material, the Ti-Al-N coating synthesis processes, as well as the research of the structure and properties of deposited coatings are presented.