Liquid reagent CVD of carbon.II.Kinetic experiments and heat and mass transport analysis

摘要

Liquid reagent CVD of carbon was performed where the substrate was immersed in liquid benzene and cyclohexane.A kinetic analysis showed the deposition rates obeyed the Arrhenius relationship with apparent activation energies of 280 and 263 kJ/mole,respectively.Deposition rates were highest for benzene.A simple analysis of heat and mass transport based on film boiling theory was performed to achieve fundamental understanding of the process and to define the rate limiting mechanism.It was demonstrated that the hydrogen inhibition effect can be neglected for the liquid reagent CVD process and a high precursor concentration near the substrate surface is achievable,which permits a high deposition rate.