Low-temperature synthesis of multiwalled carbon nanotubes by graphite antenna CVD in a hydrogen-free atmosphere

摘要

Multiwalled carbon nanotubes (MWCNTs) were synthesized at 390 °C in a hydrogen-free atmosphere by graphite antenna chemical vapor deposition, which provides carbon radicals by the etching of the antenna itself in a He-or Ar-based noble gas plasma. An increase in the number of defects in the graphite layers of the CNTs was observed with increasing hydrogen partial pressure. The results of X-ray photoelectron spectroscopy analysis suggested that these defects were caused by the transformation from an sp2 to an sp3 structure in the graphite layers of CNTs due to hydrogen radicals.