In grazing exit electron probe microanalysis (GE-EPMA), characteristic x-rays emitted from only near surface regions of a specimen are detected at extremely low exit angles near 0 degrees. Therefore, GE-EPMA is useful for localized surface analysis. However, there is a practical problem with GE-EPMA, namely, reproducibility of angle adjustment. Therefore, we developed a new instrument, a 'laser beam and four-separated photodetector system', to adjust the sample inclination. It was found that the reproducibility of angle adjustment was improved by about one-tenth by applying this system. Copyright (c) 2005 John Wiley & Sons, Ltd.
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机译：在掠射出电子探针显微分析（GE-EPMA）中，仅在接近0度的极低出射角处检测到仅从样品表面区域发出的特征X射线。因此，GE-EPMA对于局部表面分析很有用。然而，GE-EPMA存在一个实际问题，即角度调节的可再现性。因此，我们开发了一种新的仪器，即“激光束和四分离光电探测器系统”，用于调节样品的倾斜度。发现通过应用该系统，角度调节的可再现性提高了约十分之一。版权所有（c）2005 John Wiley＆Sons，Ltd.
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