Deposition of Multilayers Using Fast Switching Triple Ring Magnetron Cathode

摘要

Magnetic Co/Pd superlattices have been sputter deposited using special triple concentric ring magnetron cathode. Magnetic layer properties are investigated as function of argon/krypton sputter gas pressure and of Co layer thickness showing maximum coercivity at 0.2 nm Co thickness. Coercivity is approximately linear function of sputter pressure with highest value of 7 kOe at 40 mu bar Kr. Special software to control sputter time and power allow deposition times of less than 0.1 s for an individual layer of the superlattice. Power ratio dependent co-sputtering of two cathodes enables preparation of stoichiometrically varying TbFeCo layers giving therefore a tool for efficient investigations of magnetic properties on layer composition.