Kinetic Characteristics of the Process of Heterogeneous Recombination of O(~3P) Atoms in O_2-Ar Plasma

摘要

The probabilities of the heterogeneous recombination of oxygen atoms have been determined using the method of electron paramagnetic resonance (EPR) in a positive glow gap of O_2-Ar (0-90%) mixtures in a wide range of temperatures of the reactor wall. The apparent activation energies of the process of heterogeneous recombination have been calculated.