Influence of film thickness of Ti coating on bonding quality of glass with PET

摘要

Transmission laser bonding of dissimilar and biocompatible materials has a potential application in biomedical implants. The reliability of wafer bonding between polyethylene therephthalate and glass with Ti coating is quite dependent on the surface condition of Ti film. Ti coatings were deposited on glass substrates using radio frequency magnetron sputtering. Ti coatings with different thicknesses between 60 and 150 nm showed varying surface morphology. The effect of film thickness of Ti coating on bonding quality was studied by optical profilometer and true-colour confocal microscopy for materials. X-ray photoelectron spectroscopy (XPS) was used to tudy the bonding mechanism by evaluating the formation of chemical bond during laser bonding process. The XPS results give evidence for the formation of Ti-C and Ti-0 bonds in the sharp interfacial region.