Optoelectrical properties of PET spunbonded nonwovens deposited with ITO thin films by RF sputter coating

摘要

Indium tin oxide (ITO) films were deposited on polyethylene terephthalate (PET) spunbonded nonwovens using radio frequency (RF) magnetron sputtering under different conditions. Indium tin oxide films with different thicknesses between 56 and 224 nm showed varying transmittances in the visible and ultraviolet regions. The transmittance of the nonwoven decreased as the thickness of the ITO film increased. The electrical properties of the material were also affected by the sputtering conditions. Lager sputtering power led to better electrical conductivity of the material. Higher sputtering pressure caused a decrease in electrical conductivity. The resistivity of the films first decreased with the increase in the temperature (till 150 deg C), and then increased as the temperature increased. The materials deposited with thicker ITO showed improved electrical conductivity.