Plasma surface modification at atmospheric pressure

摘要

A plasma is an ionized gas. Ions, electrons, high-energy neutrals, radicals and ultra violet photons are generated in a plasma and these high-energy species can be used for modification of material surfaces. Surface modifications with non-thermal plasmas are attractive because of environmental compatibility, high treatment efficiency due to the non-equilibrium state at high electron temperature, and retained bulk properties of materials. They are often employed at low gas