Evaluation of the instrument for three-dimensional atom probe (3DAP)

摘要

This paper reports the evaluation and operation of laser pulse assisted three-dimensional atom probe (3DAP). With wide angle acceptance using femto second pulse laser, high speed time to digital converter, and newly designed sample-extraction electrode integrated sample holder, we can get high performance, easy to treat and wide angle 3DAP. The change of the resolution in the application to pure metals such as Mo was observed when the laser condition (laser polarization and implied voltage) was changed. Copyright (C) 2008 John Wiley & Sons, Ltd.