Quantitative analysis of conductive coatings by radiofrequency-powered glow discharge optical emission spectrometry: hydrogen, d.c. bias voltage and density corrections

摘要

Radiofrequency-powered glow discharge optical emission spectrometry (rf-GDOES) can provide rapid quantitative depth profiles of both conductive and non-conductive coatings. Examples of three types of conductive coatings are shown here: galvanized steel, a TiN hard coating and two electrical coatings. Expected compositions and thicknesses were achieved when both d.c. bias voltage and hydrogen corrections were applied. A new algorithm for calculating the density of mixed metals, oxides and nitrides is presented. The hydrogen correction is also applied to the extreme surf ace of a metal coating for the first time. Copyright (C) 2002 John Wiley Sons, Ltd. [References: 7]