Investigation of DLC-Si coatings in large-scale production using DC-PACVD equipment

摘要

Probability of practical applications of the DLC-Si coating by DC-PACVD accompanied with the pre-treatment for improving adhesion strength was examined to numbers of small steel specimens with shapes of large-scale production parts. The whole surface of long narrow holes of 15 mm diameter 100 nun long were covered with the DLC-Si coating with enough thickness and high adhesion strength because of the Uniform plasma-sheath formation at the inside holes. The coating was done on some hundreds of pins and rings with small spreads of coating thickness, silicon content, and adhesion strength. The process was concluded to have large probability for practical applications in the industry. (c) 2005 Published by Elsevier B.V.