Magnetic properties of dc magnetron sputtered and evaporated amorphous films

摘要

Compositions of Fe_(81)B_(13.5)Si_(3.5)C_2, Fe_(67)Co_(18)Si_1B_(14) and Fe_(5.85)Co_(72.15)Mo_2B_(15)Si_5 were deposited on to rigid and flexible substrates for the first time using a dc sputtering source as part of a novel Rotating Cryostat (RC). The films sputtered on silicon and glass show only isotropic magnetisation, whereas those sputtered on a polyimide (Kapton~(TM)) substrate exhibited either isotropic or anisotropic magnetisation depending upon composition. Similar findings were obtained for equivalent evaporated films.