Resonance phenomena in microwave nonmagnetized plasma source. Plasmachemical application

摘要

Scheme of coaxial microwave gas-discharge plasma source based on a "plasma resonance" phenomenon is presented. Possibility of conditions realization at which energy of accelerated in the "resonance" electrons goes into ionization processes (in volume of chamber outside of "resonance" region) is discussed. Results of experimental investigation of a coaxial microwave plasmatron in which "resonance" mechanisms have been manifested are presented. A plasmachemical reactor based on a "resonance" plasmatron is described. The data on plasmachemical decomposition of CF2Cl2 are displayed.