Various methods of micro fabrication

摘要

Although the field in which micro fabrication is applied and the field in which nanotechnology works are the same in that both deal with ultra-small objects, they are different in dimensional units: namely, nanotechnology is concerned with objects one-thousands as small as those considered in micro fabrication. The objects that are the subjects of micromachining technology are measured in units of microns. Nevertheless, the thickness of the thin films that are considered in micromachining technology is measured in nanometers. In recent years, studies have been carried out in great earnest on the construction of ultra-small structures by combining thin film production technology, ultra-fine pattern formation technology, and structure construction technology.