Diagnostics of the atmospheric-pressure plasma parameters using the method of near-field microwave sounding

摘要

A method of resonant near-field microwave probing is developed for contactless diagnostics of a high-pressure plasma. The efficiency of this method in measuring the parameters of the plasma of an rf capacitive discharge in argon under atmospheric pressure is demonstrated. The experimental results are compared with the data obtained using the independent method, the microwave radiation "cutoff," and with theoretical estimates.