Comparative Analysis of Cr-B Coatings Deposited by Magnetron Sputtering in DC and HIPIMS Modes

摘要

Surface coatings of the Cr-B system have been obtained by magnetron sputtering in the DC and high-power impulse (HIPIMS) regimes. It is established that the passage from the DC regime to HIPIMS leads to suppression of the columnar grain growth and a twofold increase in the resistance of coatings to plastic deformation, while the plasticity index and hardness of coatings increase by 29 and 18%, respectively.