Properties of Dust Particles Formed upon Sputtering of a Barium Strontium Titanate Ceramic Target in Plasma of High-Frequency Discharge in Oxygen

摘要

We have studied the behavior and properties of dust particles formed upon sputtering of a barium strontium titanate Ba(0.8)Sr(0.2)TiO_3 ceramic target in plasma of capacitive high-frequency discharge in oxygen. The particles were accumulated in potential traps situated near the target at a remote position of the substrate. Dependences of the density of accumulated dust on the pressure, discharge power, substrate posi- tion, and substrate voltage were determined using laser-radiation scattering. The dimensions and composi- tion of collected dust particles were determined.