Electrical and structural parameters of YBCO films obtained by repeated growth cycles

摘要

We have studied changes in the electrical and structural characteristics of YBa_2Cu_3O_(7 - δ) (YBCO) films in the course of step-by-step increase in their thicknesses up to about 1 μm in a series of repeated magnetron sputtering growth cycles. It is established that high quality of the films is not deteriorated by interrupts in the growth process, which involve the formation of patterns on the sample and measurement of its electrical properties in liquid nitrogen. These results show the possibility of introducing intermediate stages of lithography into the process of YBCO deposition for the formation of structures with nonuniform thicknesses.