We have studied the properties of thin ferroelectric films of barium strontium titanate (Ba,Sr)TiO3 (BSTO) obtained by RF ion-plasma deposition at various substrate temperatures in the 700-900 degrees C range. It is established that BSTO films deposited at 700-800 degrees C exhibit a polycrystalline structure. Beginning with 800 degrees C, the film structure changes so that an (111)-oriented phase appears and becomes predominating. The effect of the deposition temperature on the grain size and the relationship between the structural features and electrical properties of the films are considered.
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