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Mossbauer Spectroscopy Study of Amorphous TbFeCo Films for Perpendicular Magnetic Data Recording

机译:垂直磁数据记录的非晶TbFeCo薄膜的Mossbauer光谱研究

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摘要

Amorphous films of the Tb x Fe (100 – x – y ) Coy system with a hickness of ~200 nm were deposited byRF magnetron sputtering at various pressures of argon ( PAr) in the working chamber. It is established that the easy axis in Tb 29Fe61Co10films is oriented at an angle of 1 °±4°relative to the normal to the film surface,whereas in Tb26Fe 65Co9films this axis is parallel to the normal. The properties of the Tb26Fe65Co9films depositedatPAr= 5 mTorr meet the requirements to media for the perpendicular magnetic data recording.
机译:通过在不同的氩气(PAr)压力下通过RF磁控溅射,沉积了厚约200 nm的Tb x Fe(100 – x – y)Coy系统的非晶态膜。可以确定的是,Tb 29Fe61Co10薄膜的易轴相对于薄膜表面法线的夹角为1°±4°,而Tb26Fe 65Co9薄膜的易轴则平行于法线。在PAr = 5 mTorr时沉积的Tb26Fe65Co9薄膜的性能满足垂直磁数据记录介质的要求。

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