Transmission of through-the-lens Auger spectroscopy in an electron microscope

摘要

In this paper, the transmission properties of through-the-lens Auger spectroscopy in an electron microscope using an electro-magnetic immersion lens are calculated. The effects of changes in acceptance angle and entrance slit of the spectrometer are discussed. It is shown that by including the effects of oscillations in final angle and radius, enhanced transmission is obtained under typical experimental conditions.