Simulation of partially coherent image formation in a compact soft X-ray microscope

摘要

In this paper, we describe a numerical method of simulating two-dimensional images in a compact soft X-ray microscope using partially coherent illumination considerations. The work was motivated by recent test object images obtained by the latest generation in-house compact soft X-ray microscope, which showed diffraction-like artifacts not observed previously. The numerical model approximates the condenser zone plate as a secondary incoherent source represented by individually coherent but mutually incoherent source points, each giving rise to a separate image. A final image is obtained by adding up all the individual source point contributions. The results are compared with the microscope images and show qualitative agreement, indicating that the observed effects are caused by partially coherent illumination.