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Microscale sensors based on silicon carbide and silicon

机译:基于碳化硅和硅的微型传感器

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摘要

The current paper consists of two topics related to microelectromechanical systems (MEMS). The first topic reviews recent advances made in the area of silicon carbide (SiC) MEMS for applications in harsh environments. Given the unique properties of SiC, the potential and progress in the development and deployment of the harsh environment material for the fabrication and characterization of resonators and pressure sensors are described. The second topic details the motivation behind the study of biologically inspired systems and how silicon-based microscale sensors with out-of-plane structures could be integrated with analogue very-large-scale integrated circuits (VLSI) for insect-inspired robotic studies.
机译:本论文包含与微机电系统(MEMS)相关的两个主题。第一个主题回顾了在恶劣环境下应用的碳化硅(SiC)MEMS领域中的最新进展。给出了SiC的独特性能,描述了用于制造和表征谐振器和压力传感器的恶劣环境材料的开发和部署的潜力和进展。第二个主题详细介绍了生物启发系统研究的动机,以及具有平面外结构的硅基微型传感器如何与昆虫昆虫机器人研究的模拟超大规模集成电路(VLSI)集成在一起。

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