Polymer micromachining and applications in sensors, microfluidics, and nanotechnology

摘要

Polymer materials offer important advantages for microelectromechanical systems (MEMs) applications including (1) mechanical robustness compared with Silicon and other semiconductor materials; (2) potentially lower cost of preparation and processing; (3) low temperature processing and enhanced biocompatibility; (4) new methods of processing including molding, embossing, melt processing, and imprinting.