In a non-equilibrium plasma individual temperatures characterizing gas, inner states of molecules (rotational, vibrational and electronic temperatures) and electrons are not equal. It is possible especially for electrons to attain high energy, while the gas temperature remains relatively low. This occurs typically at low collision frequency, corresponding to pressures below 100 Torr. Atmospheric plasma, however, is typically equilibriuM. To ensure the features of non-equilibrium at atmospheric pressure, it is necesary to pump the energy mainly into electrons. Pulsed corona discharge, dielectric barrier discharge, microwave discharge and rf plasma jet are examples of such plasma sources.
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