Development of a large-area planar surface-wave plasma source with a cavity launcher driven by a 915 MHz UHF wave

摘要

A large-area planar surface-wave plasma (SWP) source driven by a 915 MHz ultrahigh frequency (UHF) wave was developed. To avoid using large, thick dielectric plates as vacuum windows, we propose a cavity launcher consisting of a cylindrical cavity with several small quartz discs at the bottom. Three types of launchers with quartz discs located at different positions were tested to compare their plasma production efficiencies and spatial distributions of electron density. With the optimum launcher, large-area plasma discharges with a radial uniformity within ±10% were obtained in a radius of about 25-30 cm in Ar gas at 8 Pa for incident power in the range 0.5-2.5 kW. The maximum electron density and temperature were approximately (0.95-1.1) × 10 ~(11) cm~(-3) and 1.9-2.0 eV, respectively, as measured by a Langmuir probe located 24 cm below the bottom of the cavity launcher. Using an Ar/NH_3 SWP with the optimum launcher, we demonstrated large-area amino-group surface modification of polyurethane sheets. Experimental results indicated that a uniform amino-group modification was achieved over a radius of approximately 40 cm, which is slightly larger than the radial uniformity of the electron density distribution.