Evolution of the parallel and perpendicular ion velocity distribution functions in pulsed helicon plasma sources obtained by time resolved laser induced fluorescence

摘要

The temporal evolution of parallel and perpendicular ion velocity distribution functions (ivdf) in a pulsed, helicon-generated, expanding argon plasma is presented. The ivdf's temporal evolution during the pulse was determined with time resolved (1 ms resolution), laser induced fluorescence. The parallel ivdf measurements indicate that, in the expansion region of the plasma and for certain operational parameters, two ion populations exist: a population moving at supersonic speeds (1.1 Mach) resulting from acceleration in an electric double layer (EDL) and a slow moving population (0.7 Mach) generated by local ionization. After 100 ins, although present, the EDL is not fully developed and has not reached a steady-state. Measurements of the perpendicular ivdf indicate constant radial expansion, with ion speeds of approximate to 400 in s(-1), in the expansion region.