Effect of the electric field of the anode sheath on the growth of aligned carbon nanotubes in a glow discharge

摘要

Arrays of aligned carbon nanotubes on silicon substrates were grown in the anode sheath of a dc glow discharge. In order to clarify the role of the electric field in the growth of nanotubes, numerical simulations of charged particle transport in the anode sheath were carried out in the drift-diffusion approximation. The distributions of the charged particle density and electric field are obtained. Possible mechanisms whereby the electric field influences the growth of aligned carbon nanotubes are analyzed. It is found that the nanotubes grow in the region in which the electric field is enhanced due to the depletion of positive ions in the anode sheath.