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Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France

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1.WAFER-SCALE 0-LEVEL PACKAGING OF (RF-)MEMS DEVICES USING BCB

机译：使用BCB对（RF-）MEMS设备进行晶圆级0级封装
- 作者：Anne Jourdain;Hocine Ziad;Piet De Moor;Harrie A.C. Tilmans
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
2.YIELD STRENGTH OF THIN-FILM PARYLENE-C

机译：薄膜聚对二甲苯-C的屈服强度
- 作者：Victor Chi-Yuan Shih;Theodore A. Harder;Yu-Chong Tai
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
3.A STUDY OF ELECTRONIC INTERFACE FOR MEMS VARIABLE OPTICAL ATTENUATOR (VOA)

机译：MEMS可变光衰减器（VOA）的电子接口的研究
- 作者：H. Cai;C. W. Chan;C. S. Thian;X. M. Zhang;C. Lu;A. Q. Liu
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
4.A COMPACT MCM IMPLEMENTATION OF AN EMBEDDED SYSTEM FOR AUTOMOTIVE APPLICATIONS

机译：嵌入式系统在汽车应用中的紧凑MCM实现
- 作者：J.L.Merino;S.A.Bota;J.Samitier;B.Niessen;E.Cabruja;J.Bausells;A.Ferre
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
5.A GENERALIZED COMPUTATIONAL FORMULATION AND MODEL FOR TRANSPORT AND STOICHIOMETRY OF MULTIVALENT WEAK ANALYTES IN CAPILLARY ELECTROPHORESIS TECHNIQUES

机译：毛细管电泳中多价弱分析物的传输和化学计量的通用计算公式与模型
- 作者：A. Chatterjee;D. Keating
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
6.A NOVEL SELF-SENSITIVE SFM FOR NONDESUTRUCTIVE MEASUREMENT OF TINY VERTICAL SURFACES WITH RESTRICTED ACCESS

机译：一种新的自敏感SFM，用于具有限制访问权限的微小垂直表面的非破坏性测量
- 作者：T. Kobayashi;X.C. Shan;Y. Murakoshi;R. Maeda
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
7.A New Methodology for Modeling MEMS Structures

机译：MEMS结构建模的新方法
- 作者：Kaiping Zeng;Zhenyu Liu;Jan G. Korvink
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
- MEMS;
- modeling;
- continuum lagrangian;
- spatial frame;
- material frame;
- maxwell's equations;
8.A NEW COMPUTATIONAL METHOD FOR PIEZOELECTRIC PLATE MODELING: APPLICATION TO MEMBRANE MICROSENSORS

机译：压电板建模的一种新计算方法：在膜微传感器中的应用
- 作者：Lorenza Ferrario;Stefano Taschini;Markus Emmenegger;Henry Baltes;Jan G. Korvink
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
9.SU8 RESIST PLASMA ETCHING AND ITS OPTIMISATION

机译：SU8抗蚀等离子体刻蚀及其优化
- 作者：Guodong Hong;Andrew S Holmes;Mark E Heaton
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
10.SU-8 PROCESS FOR BIOMEDICAL INSPECTION μ-CARRIERS

机译：SU-8生物医学μ载体检测方法
- 作者：P.-H. Chen;P.-P. Ding;J.-S. Kuo
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
11.PROCESS STRESS ESTIMATION FOR MEMS RF SWITCHES WITH MIXED ANALYTICAL AND NUMERICAL SIMULATION

机译：混合解析与数值模拟的MEMS射频开关过程应力估计。
- 作者：Lorenza Ferrario;Cristiana Armaroli;Benno Margesin;Giovanni Soncini
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
12.THEORETICAL ASPECTS CONCERNING THE CALCULUS POSSIBILITIES OF MAGNETIC FLUID CORE COILS

机译：磁流体核心线圈的计算可能性的理论方面
- 作者：Nicolae Calin Popa;Ali Siblini;Luc Jorat
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
13.STRESS CHARACTERIZATION OF ELECTROPLATED GOLD LAYERS FOR LOW TEMPERATURE SURFACE MICROMACHINING

机译：低温表面微细电镀金层的应力表征
- 作者：B.Margesin;A.Bagolini;V.Guarnieri;F.Giacotnozzi;A.Faes;R.Pal;M.Decarli
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
14.STUDY AND REALISATION OF A MICROMECHANICAL RELAY FOR USE IN A HARSH ENVIRONMENT

机译：在恶劣环境下使用的微机械继电器的研究与实现
- 作者：Francois Conseil;Patrick Derderian;Marie-France Ravat;Dominique Collard;Lionel Buchaillot
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
15.SOLDERED SEALING PROCESS TO ASSEMBLE A PROTECTIVE CAP FOR A MEMS CSP

机译：装配用于MEMS CSP的保护帽的焊接密封工艺
- 作者：Erik Jung;Andreas Ostmann;Maik Wiemer;Inna Kolesnik;Matthias Hutter
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
16.Parameter Identification and Macromodeling of Hysteresis Phenomena

机译：磁滞现象的参数辨识与宏观建模
- 作者：Dagmar Peters;Sven Rehfuss;Rainer Laur;Hans-Georg Brachtendorf
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
17.QUANTITATIVE STUDY OF THE 'M.E.M.S.N.A.S.' PROCESS FOR 3D MICROFABRICATION USING BINARY LITHOGRAPHY

机译：``M.E.M.S.N.A.S.''的定量研究使用二进制光刻技术进行3D微细加工的过程
- 作者：Frederic Marty;Serge Didelon;Bruno Mercier;Clement Moyroud;Tank Bourouina
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
18.MANUFACTURING OF MICRO ELECTRODES USING ULTRA SONIC AIDED ELECTROCHEMICAL MACHINING

机译：超音波辅助电化学加工制造微电极
- 作者：FENG-TSAI WENG;CHEN-SIANG HSU;R.F. SHYU;C. T. HO
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
19.MODEL-BASED OPTIMIZATION OF MEDICAL TEST STRIPS

机译：基于模型的医学测试条带优化
- 作者：O. Nuessen;D. Peters;H. Bolte;R. Laur
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
20.MODULAR PARAMETRIC FINITE ELEMENT MODELLING FOR RELIABILITY-STUDIES IN ELECTRONIC AND MEMS PACKAGING

机译：电子和MEMS包装中可靠性研究的模块化参数有限元建模
- 作者：Bernhard Wunderle;Juergen Auersperg;Volker Grosser;Eberhard Kaulfersch;Olaf Wittier;Bernd Michel
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
21.NEURAL NETWORK APPROACH FOR LINEARIZATION OF THE ELECTROSTATICALLY ACTUATED DOUBLE-GIMBALLED MICROMIRROR

机译：神经网络双静电微珠线性化的神经网络方法
- 作者：Guangya Zhou;Kelvin K. L. Cheo;Francis E. H. Toy;Fook Siong Chau
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
22.New aspects of simulation in hot-embossing

机译：热压印仿真的新方面
- 作者：Matthias Worgull;Mathias Heckele
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
23.NUMERICAL SIMULATION OF HYDROGEL-BASED pH-RESPONSIVE BIOSENSORS IN BIOMEMS

机译：生物体内基于水凝胶的pH响应生物传感器的数值模拟
- 作者：Hua Li;Y. K. Yew;K. Y. Lam;T. Y. Ng
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
24.ON-CHIP TESTING OF MEMS USING PSEUDO-RANDOM TEST SEQUENCES

机译：使用伪随机测试序列对MEMS进行芯片上测试
- 作者：L. Rufer;S. Mir;E. Simeu;C. Domingues
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
25.HEXAGONAL MICROLENS ARRAY FABRICATED BY PROXIMITY PRINTING VIA UV LITHOGRAPHY

机译：通过紫外光刻法制得的六角形微阵列
- 作者：Hsiharng Yang;Che-Ping Lin;Ching-Kong Chao;Cheng-Tang Pan
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
26.MICROFABRICATION OF ELECTROPLATED INTEGRATED CHROMIUM TIPS ONTO A SILICON ACTUATOR

机译：电镀集成铬提示在硅执行器上的微细加工
- 作者：Erwan LENNON;Frederic AYELA
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
27.MECHANICAL QUALIFICATION OF RF-FILTERS FOR SPACE APPLICATIONS

机译：用于空间应用的射频滤波器的机械鉴定
- 作者：Xavier Lafontan;Jessica Kuchenbecker;Bertrand Guillon;Patrick Pom;Philippe Nerin;Francis Pressecq;Muriel Dardalhon;Sebastien Rigo
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
28.DYNAMICS MODELING OF MICROBEAMS UNDER ELECTROSTATIC LOAD

机译：静电载荷下微梁的动力学建模
- 作者：E.Brusa;F.De Bona;A.Gugliotta;A.Soma
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
29.Electro-thermal simulation of MEMS elements

机译：MEMS元件的电热模拟
- 作者：M. Rencz;V. Szekely;A. Poppe;B. Courtois
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
30.PRODUCTION METROLOGY FOR MEMS CHARACTERIZATION

机译：MEMS表征的生产计量
- 作者：Erik Novak;Freeh Pasop;Trisha Browne
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
31.SELF-ALIGNED 0-LEVEL SEALING OF MEMS DEVICES BY A TWO LAYER THIN FILM REFLOW PROCESS

机译：通过两层薄膜回流工艺对MEMS设备进行自对准0级密封
- 作者：Cristina Rusu;Henri Jansen;Robert Gunn;Ann Witvrouw
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
32.GETTERS FILMS AT WAFER LEVEL FOR WAFER TO WAFER BONDED MEMS

机译：晶圆级晶圆的贴膜，用于晶圆级联的MEMS
- 作者：Marco Moraja;Marco Amiotti
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
33.FRACTURE BEHAVIOUR OF SINGLE CRYSTAL SILICON MICROSTRUCTURES

机译：单晶硅微结构的断裂行为
- 作者：F. Favalli Meroni;E. Mazza
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
34.FEASIBILITY OF A FLIP CHIP APPROACH TO INTEGRATE AN IR FILTER AND AN IR DETECTOR IN A FUTURE GAS DETECTION CELL

机译：在未来的气体检测池中集成红外滤光片和红外探测器的倒装芯片方法的可行性
- 作者：L. Fonseca;E. Cabruja;C. Calaza;R. Rubio;J. Santander;E. Figueras;I. Gratia;C. Cane;M. Moreno;S.Marco
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
35.FABRICATION SUB-MICRON GRATINGS BASED ON EMBOSSING

机译：基于压花的亚亚微米级网格
- 作者：Yigui Li;Chun Hui;Jun Zhu;Jingquan Liu;Yoshiaki Kanamori
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
- silicon mold;
- electron beam lithography;
- FAB;
- replication;
36.CONSTRUCTION OF NONLINEAR DYNAMIC MEMS COMPONENT MODELS USING COSSERAT THEORY

机译：基于COSSERAT理论的非线性动态MEMS组件模型的构建。
- 作者：C. Wang;D. Liu;R. Rosing;B. De Masi;A. Richardson
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
37.COMPUTER AIDED DESIGN OF A RADIOMETRIC SYSTEM FOR MATERIAL SHEET PRODUCTION

机译：物料清单生产放射线系统的计算机辅助设计
- 作者：H. Bolte;O. Nuessen;D. Peters;R. Laur;D. Richter
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
38.Design and Modelling of a Microsensor for Atmospheric Electric Field Measurement

机译：大气电场测量微传感器的设计与建模
- 作者：Zheng Cui;Chao Gong;Shanhong Xia
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
- field sensor;
- atmospheric electric field;
- electron deflection;
39.VHDL-AMS MODELLING, SIMULATION AND TESTING OF ELECTROSTATIC MICROMOTORS

机译：静电微机的VHDL-AMS建模，仿真和测试
- 作者：A. Endemano;J.Y. Fourniols;H. Camon;A. Marchese;S. Muratet;F. Bony M.P.Y. Desmulliez
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
40.THREE-DIMENSIONAL MEMS SIMULATION USING EULER PARAMETERS

机译：使用EULER参数的三维MEMS仿真
- 作者：Giorgio Casinovi
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
41.THE HIERARCHICAL HDL-BASED DESIGN OF AN INTEGRATED MEMS-CMOS OSCILLATOR

机译：基于分层HDL的集成MEMS-CMOS振荡器设计
- 作者：Roberto Gaddi
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
42.UNDERSTANDING FAULTY BEHAVIOR OF A PERISTALTIC MICROPUMP

机译：理解蠕动微型泵的故障行为
- 作者：M. Knight;B. Kaminska;J. House
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
43.ANALYSIS OF FAILURE MODES AND MECHANISMS IN THERMALLY ACTUATED MICROMACHINED RELAYS FOR HARSH ENVIRONMENTS SPACE APPLICATIONS

机译：恶劣环境空间应用中的热驱动微机械继电器的失效模式和机理分析
- 作者：Alexander Teverovsky;Ashoh Sharma
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
44.ANALYSIS, AND OPTIMIZATION OF A CMOS VERTICAL THERMAL ACTUATOR

机译：CMOS垂直热执行器的分析和优化
- 作者：Amal Mohamed;Hamed Elsimary;Mohammed Ismail
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
45.AN APPROACH OF LATERAL RF MEMS SWITCH FOR HIGH PERFORMANCE

机译：高性能横向RF MEMS开关的方法
- 作者：M. Tang;A. Agarwal;J. Li;Q. X. Zhang;P. Win;J. M. Huang;A. Q. Liu
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
46.'PLUG-UP' - A NEW CONCEPT FOR FABRICATING SOI MEMS DEVICES

机译：“ PLUG-UP ” –制造SOI MEMS设备的新概念
- 作者：Jyrki Kiihamaeki;Panu Pekko;Hannu Kattelus;Teuvo Sillanpaeae;Tomi Mattila
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
- silicon on insulator;
- micromachining;
- vacuum sealing;
- porous polysilicon;
47.3D silicon turning micromirror

机译：3D硅车削微镜
- 作者：Chen;Shi-Hao;Chien;Chao-Heng
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
48.A CMOS Low Noise Amplifier for Biomedical Telemetry Applications

机译：用于生物医学遥测应用的CMOS低噪声放大器
- 作者：Robson Luiz Moreno;Edgar Charry Rodrigues
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
49.A MIXED-MODE INTERFACE CIRCUIT FOR GAS SENSOR CONTROL AND MEASURE

机译：用于气体传感器控制和测量的混合模式接口电路
- 作者：J.L. Merino;R. Casanova;A. Dieguez;S.A. Bota;J. Samitier;C. Cane
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
50.A NOVEL METHOD FOR DETERMINING YOUNG'S MODULUS OF THIN FILMS BY MICRO-STRAIN GAUGES

机译：用微应变计测定薄膜的杨氏模量的新方法
- 作者：Chi Hsiang Pan
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
51.A NOVEL DRIE FABRICATION PROCESS DEVELOPMENT FOR SOI-BASED MEMS DEVICES

机译：基于SOI的MEMS设备的新型DRIE制造工艺开发
- 作者：J. Li;Q. X. Zhang;A. Q. Liu
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
52.A NOVEL ELECTRICALLY CONTROLLED FLEXIBLE LIQUID MICRO LENS

机译：新型电控柔性液体微透镜
- 作者：Marco Feldmann;Sebastian Butefisch;Stephanus Buettgenbach
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
53.A NEW ELECTROFORMING TECHNOLOGY IN AID OF PRESSURE FOR LIGA PROCESS

机译：Liga工艺压力辅助的新电铸技术
- 作者：Hsiharng Yang;Tsung-Shuin Tsai;Reiyu Chein;Chia-Hua Chang;Jen-Chin Wu
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
54.P~+ SILICON RECESSED MICROMECHANICAL STRUCTURES FOR MEMS APPLICATIONS

机译：适用于MEMS应用的P〜+硅微结构
- 作者：Prem Pal;Suneet Tuli;Sudhir Chandra
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
55.THIN FILM FORMATIONA FABRICATION ON NON-PLANAR SURFACE BY SPRAY COATING METHOD

机译：喷涂法在非平面表面形成薄膜
- 作者：Masaaki Ichiki;Lulu Zhang;Zhen Yang;Tsuyoshi Ikehara;RyutaroMaeda
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
56.THERMAL AND MECHANICAL SIMULATION OF BULK RESONATORS

机译：本体谐振器的热力学模拟
- 作者：M.Morata;E.Figueras;I.Gracia;L.Fonseca;C.Cane
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
57.TESTING OF A LIGA-MICROSPECTROMETER FOR MONITORING DISSOLVED NICKEL CONCENTRATION WHEN ETCHING NICKEL AND ITS ALLOYS IN AQUEOUS FERRIC CHLORIDE SOLUTIONS

机译：在氯化铁水溶液中蚀刻镍及其合金时，用于监测溶解的镍浓度的微显微镜的测试
- 作者：David M. Allen;Heather J. A. Almond;Denis Boubal
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
58.PARALLEL-BEAMS/LEVER ELECTROTHERMAL OUT-OF-PLANE ACTUATOR

机译：平行光束/杠杆电热平面外执行器
- 作者：S. Deladi;G. Krijnen;M.C. Elwenspoek
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
59.MIXED SYSTEM AND COMPONENT LEVEL T-CAD FOR MICRO FABRICATION

机译：微型系统的混合系统和组件级T-CAD
- 作者：U. Hansen;C. Germer;S. Buettgenbach;H.J. Franke
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
60.Design and characterisation of a low-power micromachined spatial light modulator

机译：低功率微机械空间光调制器的设计与表征
- 作者：Graeme McRobbie;Zaikang Ling;Fraser Clark
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
- MEMS;
- optical;
- spatial modulator;
- finite element;
61.DESIGN AND FABRICATION OF A PERISTALTIC MICROPUMP

机译：蠕动微泵的设计与制造
- 作者：M. Knight;J. House
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
62.DEVELOPMENT OF A 3D-CAD ADD-IN FOR TOLERANCE ANALYSIS AND SYNTHESIS IN MICRO SYSTEMS (μ-TOAST)

机译：用于微系统公差分析和合成的3D-CAD附加模块的开发（μ-toast）
- 作者：C. Germer;U. Hansen;H.-J. Franke;S. Buettgenbach
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
63.DIELECTRIC MICEOCAVITY RESONATORS BASED ON SILICON MOLD

机译：基于硅树脂模的介电微腔谐振器
- 作者：Yigui Li;Di Chen;Jun Zhu;Jingquan Liu;Jiliang Zhang
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
- microcavity resonators;
- silicon mold;
- optical filter;
64.On-wafer electro-mechanical characterization of silicon MEMS switches

机译：硅MEMS开关的晶圆上机电特性
- 作者：Leandro Lorenzelli;Kamal J Rangra;Cristian Collini;Flavio Giacomozzi;Benno Margesin Fernando Pianegiani
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
65.Hot embossing characteristics of PEEK compared to PC and PMMA

机译：PEEK与PC和PMMA相比的热压花特性
- 作者：Yoichi Murakoshi;Xue Chuan Shan;Toru Shimizu;Ryutaro Maeda
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
- MEMS;
- optical switch;
- mirror;
- PEEK;
- PC;
- PMMA;
- Hot embossing;
- nickel mould;
66.EVALUATION OF PRINCIPAL CHARACTERISTICS OF CIRCULAR RESONATOR IN THIN FILM APPLICATIONS

机译：薄膜应用中圆形谐振器主要特性的评估
- 作者：S. Myllymaki;E. Ristolainen;P. Heino;A. Lehto;K. Varjonen
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
67.Electronic Test Solutions for FlowFET Fluidic Arrays

机译：FlowFET流体阵列的电子测试解决方案
- 作者：Hans G. Kerkhoff;Mustafa Acar
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
- multi-domain testing;
- MEMS testing;
- microsystem testing;
- multi-domain fault modelling simulation;
- design-for-Testability;
68.ION TRACK LITHOGRAPHY: NOVEL LOW-COST PROCESS TO FORM DEEP VERTICAL AND HIGH ASPECT RATIO MEMS IN FLEXIBLE LAMINATES

机译：离子轨迹光刻技术：新型低成本工艺，可在柔性叠层中形成深垂直和高纵横比的MEMS
- 作者：H. Majjad;M. Lindeberg;M. Skupinski;K. Hjort
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
69.INTEGRATED MULTISTAGE MEMS-BASED OPTICAL SWITCH

机译：基于集成多级MEMS的光开关
- 作者：Geng-Sheng (G.S.) Kuo;Yong Yin
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
- MEMS;
- optical switch;
- multistage;
- optical loss;
- architecture.;
70.Ensuring Reliability and Repeatability in LIGA Mold Insert Fabrication

机译：确保LIGA模具嵌件制造的可靠性和可重复性
- 作者：J. Schulz;K. Bade;M. Guttmann;L. Hahn;A. Janssen;U. Koehler;P. Meyer;F. Winkler
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
71.ELECTROMECHANICAL AND ELECTROMAGNETIC ANALYSES OF TWO- AND THREE-PLATE VOLTAGE-CONTROLLED OSCILLATORS (VCOS) WITH MICROMACHINED TUNABLE CAPACITORS

机译：具有微机械可调电容器的两板和三板电压控制振荡器（VCOS）的机电和电磁分析
- 作者：Daniel J. Keating;Marco Farina;Ijaz Jafri
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
72.Fabrication comb-drive device by MEMS and electroplating

机译：通过MEMS和电镀制造梳齿驱动装置
- 作者：Chien;Chao-Heng;Chen;Shi-Hao
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
73.DESIGN AND SIMULATION OF MEMS OPTICAL CROSSCONNECT WITH INTEGRATED NANOPHOTONIC CRYSTALS TECHNOLOGY

机译：集成纳米光子晶体技术的MEMS光学交叉连接设计与仿真
- 作者：H.G. Teo;J. Singh;C. Lu;A.Q. Liu
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
74.CONSTRUCTION KIT FOR MICROOPTICAL SYSTEMS ON THE BASIS OF MICROOPTICAL BENCHES

机译：基于微光台的微光系统构建套件
- 作者：Ingo Sieber;Ulrich Gengenbach;Andreas Hofmann
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
75.Behavioral Modeling and Simulation of Micromechanical Resonator for Communications Applications

机译：通信应用微机械谐振器的行为建模与仿真
- 作者：Cecile Mandelbaum;Sebastien Cases;David Bensaude;Laurent Basteres;Philippe Nachtergaele
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
76.CALCULATION OF PARTIAL CAPACITANCES USING A MODIFIED ITERATIVE COMPLEX IMAGE METHOD

机译：使用改进的迭代复杂图像方法计算部分电容
- 作者：Sven Rehfuss;Christian Gorecki;Dagmar Peters;Rainer Laur
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
77.CAPACITIVE HUMIDITY SENSOR USING A POLYIMIDE SENSING FILM

机译：使用聚酰亚胺传感膜的电容式湿度传感器
- 作者：J. Laconte;V. Wilmart;J.-P. Raskin;D. Flandre
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
- capacitive humidity sensors;
- polyimide;
- interdigitated electrodes;
- CMOS-compatibility;
78.BONDING OF POLYMER MICROSTRUCTURES BY UV IRRADIATION AND WELDING AT LOW TEMPERATURES

机译：紫外线照射下聚合物微结构的粘接和低温焊接
- 作者：R. Truckenmueller;P. Henzi;D. Herrmann;V. Saile;W.K. Schomburg
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
79.APPLICATION OF THE ,,MULTI ARCHITECTURE MODELING' DESIGN METHOD TO SYSTEM LEVEL MEMS SIMULATION

机译：多体系结构建模设计方法在系统级MEMS仿真中的应用
- 作者：Michael Schlegel;Goran Herrmann;Dietmar Mueller
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年
80.DESIGN PROCESS SUPPORTING SIMULATIONS ON WAFER LEVEL PACKAGES

机译：晶圆级包装的设计过程支持模拟
- 作者：Johann-Peter Sommer;Olaf Wittier;Dionysios Manessis;Bernd Michel
- 会议名称：《Fifth Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS; May 5-7, 2003; Cannes, France》 | 2003年