容量結合型キャピラリープラズマ源

摘要

Capacitively coupled capillary Ar and He plasmas have been generated in a quartz tube with the inner/outer diameters of 1.0/3.0 mm at the RF (13.56 MHz) powers of 3-7 W using the externally attached parallel-plate electrodes. Plasma expansion along a tube axis was a maximum at a gas pressure of 10 - 20 kPa, in which V_(pp) was a minimum and so Paschen's minimum condition was satisfied. The capillary plasma was magnetized by a strong magnetic field of 0.4 T to sustain the plasma at a low pressure, since the plasma did not ignite at the gas pressure below 2-4 kPa. The optical emission spectrum analysis revealed that atomic excitation temperature increased with decreasing gas pressure. Furthermore, it was found that the metastable atoms play an important role in the plasma sustenance at a high gas pressure.%内径/外径が1.0/3.0mmの石英管表面に平行平板電極を密rn着させることで，容量結合型Ar,Heキャピラリ－プラズマrnをRF電力3-7Wで生成させた．本研究で以下の内容が明rnらかになった．rn（1）管内ガス圧力が10-20kPaでプラズマの伸びが最大とrnなった?このガス圧力領域ではV_(pp)が最小となり，パッrnシュン曲線の最小値でプラズマの伸びが最大となることrnが判った．